| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining technique which is excellent in mass productivity. <P>SOLUTION: The laser beam machining device is equipped with a laser generator 10 for generating a light beam, branching means 16 and 18 for branching the light beam to a plurality of the beams 51 arranged at equal intervals, a moving means 30 for moving the plurality of the beams 51 relatively on a subject at a pitch natural times the arrangement intervals thereof and a control means 40 for controlling the intensity of the beams in synchronization with the moving pitches of the plurality of the beams 51. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
