POLYIMIDE PRECURSOR, METHOD FOR PRODUCING THE SAME, METHOD FOR PRODUCING POLYIMIDE PRECURSOR ORGANIC SOLVENT SOLUTION, METHOD FOR PRODUCING CAST FILM, AND METHOD FOR PRODUCING POLYIMIDE FILM

摘要

PROBLEM TO BE SOLVED: To provide a polyimide having a combination of low dielectric constant with low coefficient of linear thermal expansion. SOLUTION: A polyimide precursor is provided, being composed of recurring structural units of the structural formula(1). A homogeneous and viscous polyimide precursor organic solvent solution with scarce salt formation is obtained if the rate of silylation of the polyimide precursor is made to fall within the range from 0.4 to 0.9 in forming the precursor. Further, by imidating the polyimide precursor, the polyimide having a combination of low dielectric constant with low coefficient of linear thermal expansion is obtained. COPYRIGHT: (C)2005,JPO&NCIPI