发明名称 |
Optical component formation method |
摘要 |
Provided are methods of forming optical components. The methods involves (a) forming over a substrate a layer of a photoimageable composition that includes a hybrid organic-inorganic polymer and a photoactive component, wherein the layer has a first index of refraction and a first dissolution rate; and (b) exposing by multi-photon absorption using actinic radiation a predefined volume of the layer. The volume is caused to have: (i) a second index of refraction which is different than the first index of refraction and/or (ii) a second dissolution rate which is different than the first dissolution rate. The methods have particular applicability in the formation of optical waveguides and other optical components.
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申请公布号 |
US2005123862(A1) |
申请公布日期 |
2005.06.09 |
申请号 |
US20040939526 |
申请日期 |
2004.09.13 |
申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C. |
发明人 |
PUGLIANO NICOLA;ALLEN CRAIG S. |
分类号 |
G03F7/004;C08G77/04;G02B5/18;G02B6/00;G02B6/12;G03C5/00;G03F7/075;G03F7/20;(IPC1-7):G03C5/00 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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