PHOTO-DETECTOR AND SPECTROSCOPE USING THE SAME

摘要

On a substrate (10) of a photo-detector (1A) having an n-type substrate (101) and a p-type epitaxial layer (102), there are provided a photodiode array having a plurality of photo diodes (12) (n-type channel region 121) and a light introducing unit (13) having an opening for introducing the light detected by the photo diode (12). Furthermore, a layer portion of the epitaxial layer (102) located between the photo diode array (11) and the light introducing unit (13) constitutes a carrier capture unit (60) for capturing the carriers generated on the substrate portion in the vicinity of the light introducing unit (13) and discharging them outside via an electrode (61). With this, it is possible to realize a photo-detector capable improving the positioning accuracy of its constituent elements when applied to a spectroscope, and a spectroscope using it.