| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technology capable of reducing manufacturing cost, by shortening manufacturing time, when forming recessed parts mutually different in the depth to a glass substrate. <P>SOLUTION: This manufacturing method of a structure forms a plurality of recessed parts different in the depth on the glass substrate, and includes a first process of forming a deterioration area 14 extending in the thickness direction of the glass substrate by scanning a focus of a laser beam in the thickness direction of the glass substrate by irradiating the laser beam 12 to an area for forming the first recessed part of the glass substrate 10, a second process of forming an etching mask 16 having an opening 18 for exposing an area for forming the second recessed part shallower in the depth than the first recessed part on one surface and/or the other surface of the glass substrate, and a third process of forming the first recessed part 22 in a part along the deterioration area and forming the second recessed part 24 in an area corresponding to the opening of the etching mask by etching the glass substrate. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
