DEFLECTOR, MANUFACTURING METHOD OF ELECTRODE, AND CHARGED PARTICLE BEAM EXPOSING DEVICE USING THE DEFLECTOR

摘要

PROBLEM TO BE SOLVED: To provide a deflector with few malfunction, prevented from exfoliation or fall-off of a deflection electrode, and also to provide a charged particle beam exposing device having high reliability by using the deflector. SOLUTION: On the deflector 500 having electrodes 503a, 503b arranged at the side wall of a through-hole 513 formed on a base plate 501, a vertical cross section of the electrode is formed into an L shape or a U shape by extending at least one end part of either an upper face side or a lower face side of the base plate, and bending it so as to wrap around at least the upper face or the lower face of the base plate. Further, the deflector is uses as a blanker of the charged particle beam exposing device. COPYRIGHT: (C)2005,JPO&NCIPI