| 摘要 |
PROBLEM TO BE SOLVED: To non-destructively and rapidly perform quantitative measurement by a simple method, on the composition of a compound oxide thin film formed on a metallic film or on a non-translucent substrate. SOLUTION: This method comprises a process of performing reflected light spectrometry including a visible light domain with respect to a sample 90, comprising the transparent compound oxide thin film 60 formed on the metal film 70 or on the non-translucent substrate 80, to find intensity spectrum with respect to the wavelength of reflected light 100; a process of performing reflected light spectrometry with respect to a plurality of comparative samples comprising compound oxide thin films, each having a known composition, finding an intensity spectrum with respect to each wavelength of the reflected light 100, calculating a threshold wavelength from each intensity spectrum, and calculating a correlation curve between the threshold wavelengths and the composition; and a method of calculating a threshold wavelength from this intensity spectrum of the sample 90 and performing quantitative determination on the composition of the specimen 90 from the threshold wavelength and the correlation curve. COPYRIGHT: (C)2005,JPO&NCIPI
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