| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and a device for working a plate-shaped object for efficiently carrying out working to a desired position of the plate-shaped object even when there is any variation in the thickness of the plate-shaped object. <P>SOLUTION: This method for working a plate-shaped object is provided to hold a plate-shaped object on whose surface a plurality of working scheduled lines are formed in parallel on a chuck table, and to carry out predetermined working to the plate-shaped object held on the chuck table along the working scheduled lines by a working means. This working method comprises a height position detecting process for detecting the height position of the face whose working is carried out along the working scheduled lines of the plate-shaped object held on the chuck table; a working process for controlling the working means in a direction vertical to the working face of the plate-shaped object corresponding to the height position detected by the height position detecting process, and for carrying out predetermined working along the working scheduled lines; and a dividing/delivering process for dividing/delivering the chuck table holding the plate-shaped object to a dividing direction at right angles to the plurality of working scheduled lines formed on the plate-shaped object only by quantity equivalent to the intervals of the working scheduled lines. The height position detecting process is carried out to one or more working scheduled lines ahead in the dividing direction from the working process. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
