| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a laser-beam product and a laser beam apparatus which enable a reduction in the number of spattered materials generated by irradiation with a laser beam, prevent the adverse influence due to the adhesion of the spattered materials is prevented, and improve product quality. <P>SOLUTION: A TFT board 11 supported by a placing table 20 is irradiated with a laser beam LB through a window 41 of a local machining part 40, and a short-circuited part 12A of a wiring pattern 12 is corrected. A laser-beam LB irradiation position on the TFT board 11 is locally evacuated by a local exhaust mechanism 50. The spattered materials generated by the irradiation with the laser-beam is sucked from an exhaust hole 51 to be removed. The exhaust hole 51 is formed in a way that the hole passes through the local machining part 40 from the vicinity of the laser-beam LB irradiation position, for example the inner surface of a laser-beam irradiation chamber 42. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
