| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ground electrode temperature control method improving response of electrode temperature control. <P>SOLUTION: A space 14 is formed inside an electrode 12 of a ground electrode unit 10 and filled with temperature control media, and a temperature detecting device 20 detecting the temperature of the temperature control media and a temperature control device 30 cooling or heating the temperature control media are arranged. Preferably, a stirrer 40 stirring the temperature control media is additionally arranged in the space 14. A high voltage side electrode is arranged so as to face the electrode 12. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
