| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine adjustment stage that can be improved in positioning control characteristics by reducing the influence of the elastic vibration of the stage. SOLUTION: The fine adjustment stage is provided with the movers 504X1, 504X2, 504Y1, and 504Y2 of three or more direct-acting actuators which generate thrusts in a horizontal direction to the surface of a top board 501 on which a substrate can be mounted. At least, the stage can be moved with a total of three degrees of freedom of two degrees of freedom in transitional movement and one degree of freedom in rotational movement in a plane parallel to the top board 501 by means of the direct-acting actuators. The actuators are disposed at nearly equal internals on a circle 500 roughly drawn around the center of gravity of the stage so that the working axes of the thrusts generated by the actuators may coincide with the direction of the tangential line of the circle 500. At the same time, the actuators are driven so that the actuators may simultaneously generate nearly equal thrusts when the fine adjustment stage is driven with one degree of freedom in rotational movement. COPYRIGHT: (C)2005,JPO&NCIPI |
