| 摘要 |
PROBLEM TO BE SOLVED: To realize a cooling air flow control with satisfactory responsiveness controlled so as to be capable of suitably cooling each high power circuit during a burn-in test. SOLUTION: A plurality of burn-in boards 20 having a plurality of integrated circuits 44 each of which is tested in a heated condition are arranged at fixed intervals and stacked, and a plurality of valve trays 22 for controlling air flow are arranged between two adjacent burn-in boards 20. Each valve tray 22 has a cooling air plenum chamber 26 formed thereon, and a plurality of opening parts 58, and a valve 40 is provided thereon so as to perform a flow control at least by a selected opening part 58. Each opening part 58 is provided above the integrated circuit 44 or device to be tested on the burn-in board 20 under the valve tray 22 concerned. The valve 40 controls the flow rate of air for cooling the integrated circuit 44. COPYRIGHT: (C)2005,JPO&NCIPI
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