| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement detector capable of enhancing detection resolution and environmental resistance. SOLUTION: This displacement detector 100 is provided with a main scale 110, and a detection head part 120. The detection head part 120 is provided with a light emitting and photoreceiving part 130, and an optical device unit part 140. The optical device unit part 140 is provided with a first diffraction scale 141, and a second diffraction scale 143. The first diffraction scale 141 has a first transmission type diffraction grating 142. The second diffraction scale 143 has a diffraction grating. The second transmission type diffraction gratings 144 are constituted in both areas of a metal film 146, in the second diffraction scale 143, and a third reflection type diffraction grating 145 is constituted by the metal film 146, when viewing the second diffraction scale 143 from a main scale 110 side. COPYRIGHT: (C)2005,JPO&NCIPI
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