| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid controller with a diaphragm whose fastening degree can be visually, easily and accurately identified without causing the leakage of fluid distributing in a flow path to the outside even when a portion of the diaphragm abutting on the opening edge of a valve box deteriorates. SOLUTION: The fluid controller comprises the valve casing having an inlet flow path and an outlet flow path, a valve body, the diaphragm fixed in the state of being held in a gap between the valve casing and the valve body via a holding member, and an operation mechanism for expanding the diaphragm. The valve casing has an endless sealing protruded portion abutting on the peripheral side face of the holding member for sealing the inlet flow path and the outlet flow path. The holding member enters into a recessed portion encircled by the sealing protruded portion and the lower face of the holding member abuts on the upper face of the diaphragm instead of the upper face of the sealing protruded portion. The upper end on the peripheral side face of the holding member is located above the upper end face of the sealing protruded portion and the peripheral side face of the holding member is provided with an indicator which allows visual identification of the degree of a depth of the peripheral side face entering into the recessed portion. COPYRIGHT: (C)2005,JPO&NCIPI
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