| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device having a chemical pollutant measuring device capable of realizing an evaluation of pollution caused by a chemical pollutant by classifying an organic matter at several steps of boiling levels and showing respective concentration levels. SOLUTION: The substrate processing device comprises a housing 11 for housing a process tube 26 in which a processing chamber 25 for processing a substrate 1 is formed, a quartz crystal 75 placed in the housing 11 and exposed to an atmosphere in the housing, temperature controllers 70, 73 for heating a temperature of the quartz crystal 75, a detecting part 77 for detecting an oscillation frequency of the quartz crystal 75, a temperature controller 74 for controlling the temperature controllers 70, 73 so as to increase the temperature of the quartz crystal in stages, and a controlling part 78 for computing a quantity and concentration of a plurality of types of an organic matter having different boiling points by respectively detecting the frequency of the quartz crystal at each stage by the detecting part 77. COPYRIGHT: (C)2005,JPO&NCIPI
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