发明名称 INSPECTION METHOD AND INSPECTION DEVICE OF TFT ARRAY
摘要 <P>PROBLEM TO BE SOLVED: To detect defects of a data line, and defects of a TFT inner circuit as well. <P>SOLUTION: A very small parasitic capacity (Cp1 to Cp3) exists in organic EL electrodes 10, lines 21 to 23 around the electrodes, and between the electrodes. By impressing a pulse signal on scan signal lines 22, data lines 21, and power supply lines 23 with appropriate timing respectively, the organic EL electrodes are made to maintain an information of voltage Vdd of the power supply line 23 by the parasitic capacity in organic EL electrodes 10, surrounding lines, and between electrodes. The voltage of the organic EL electrode generated by the impressed voltage Vdd is maintained by the parasitic capacity at normal pixels of the TFT array. The maintained voltage of a defective pixel is different from that of normal pixel because of circuit abnormality. The inspection of the TFT array is carried out by detecting fault by reading out the voltage of the organic EL electrode at circuit abnormality as a voltage information. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005149768(A) 申请公布日期 2005.06.09
申请号 JP20030381763 申请日期 2003.11.11
申请人 SHIMADZU CORP 发明人 OGAWA KIYOSHI
分类号 G01R31/00;G02F1/13;G09G3/20;G09G3/30;H01L29/786;H01L51/50;H05B33/12;H05B33/14 主分类号 G01R31/00
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