Apparatus and process for the separation of particles from thermally after-treated process offgases

摘要

The invention relates to an apparatus and a process for the separation of particles from thermally after-treated process offgases which are obtained, in particular, in the surface modification of various substrates in vacuum units. The invention provides, in accordance with its object, an inexpensive and effective way of carrying out the separation of very small solid particles present in thermally after-treated process offgases. The apparatus of the invention is configured so that the process offgases which have been thermally after-treated in combustion chambers are conveyed via a cooler through an agglomeration stage and solid particles present in the after-treated process offgas can be separated off in a scrubbing stage.