<p>A method of analyzing a trace component, in which the preparation of a sample for analyzing a trace component of a material can be accomplished by one short-time extraction operation without conducting long-time extraction operation to thereby realize rapid analysis of trace components of materials. In particular, the method of analyzing a trace component comprises the step of disposing on a sample stage a sample piece of a material to be analyzed; the step of dropping on the sample stage a solvent capable of extracting a component from the sample piece so as to incorporate the solvent in the clearance between the sample stage and the sample piece disposed on the sample stage; the step of retaining at room temperature the solvent incorporated in the clearance between the sample stage and the sample piece so as to extract a component from the sample piece by means of the solvent retained in the clearance between the sample stage and the sample piece; and the step of analyzing the component having been extracted from the sample piece.</p>