PRESSURE SENSOR DEVICE

摘要

A sensor substrate (1) having on its lower surface a surface acoustic wave element (2) for detecting pressure is mounted on a supporting substrate (6) through a sealing member (4) surrounding a sensor section (2). A sealing space S is formed by the sensor substrate (1), the supporting substrate (6), and the sealing member (4), and the surface acoustic wave element (2) for detecting pressure is sealed hermetically in the sealing space S. Reliability can be enhanced by protecting the surface acoustic wave element (2) from the external environment.