| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dry film photoresist having high resolution equipped with a photosensitive resin composition layer capable of forming a high strength cured layer (tent film). <P>SOLUTION: The dry film photoresist is equipped with the photosensitive resin composition layer containing a binder, a polymerizable monomer component, a photopolymerization initiator, and inorganic fine particles having polymerizable groups on a support. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
