| 摘要 |
<P>PROBLEM TO BE SOLVED: To inspect color shading of a color filter substrates to be inspected in which a plurality of coloring pixels in a plurality of colors are regularly ordered readily and with high precision. <P>SOLUTION: A blue color filter substrate 20 having transmission spectral characteristics almost identical to the blue-colored pixel 13 of a color filter substrate to be inspected 10 is provided between a white surface light source lamp 1 and the color filter substrate to be inspected 10. By this, most of the light which goes out (transmits) from the color filter substrate to be inspected 10 can become the transmitted light from the blue-colored pixel 13, and the transmitted light from other green-colored pixel 14 and red-colored pixel 15 can be eliminated (or made to be minimal). Therefore, a slight strength and weakness of the transmitted light found at a membrane thickness abnormal part (shading part) of the blue-colored pixel 13 can be inspected without being disturbed by the transmitted light from the green-colored pixel 14 and the red-colored pixel 15, and a blue color shading of the color filter substrate to be inspected 10 can be inspected readily with high precision. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
