发明名称 SUPPORTING STRUCTURE OF ULTRASONIC HORN
摘要 PROBLEM TO BE SOLVED: To provide a supporting structure of a ultrasonic horn capable of suppressing the attenuation of a supersonic vibration. SOLUTION: The ultrasonic horn 12 is held by a holding part 13 of the horn holder 11, and a holding tool 22 is screwed down to a fixing hole 21 at a tip of an amplifier 16. A nail part 44 is provided to the holding part 13 and the horn body 14 is held and fixed from its periphery part. The nail 44 is arranged at an underpart 31 at the end of the horn body 14 so that a vibration component in an orthogonal direction is a minimum "zero", that is, a vibration component in an axis direction is a maximum value. A horn support 51 is provided to the horn holder 11 and the horn 12 is supported from above with its movement in an axis direction admitted. The supporting position by the horn support 51 is set to a node position 32 at the tip of the horn body 14 so that the vibration component in the orthogonal direction is a maximum value and the vibration component in the axis direction is a minimum "zero". COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005150560(A) 申请公布日期 2005.06.09
申请号 JP20030388622 申请日期 2003.11.19
申请人 NIDEC TOSOK CORP 发明人 NAGANO KAZUAKI
分类号 H01L21/607;(IPC1-7):H01L21/607 主分类号 H01L21/607
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