METHOD FOR MANUFACTURING MULTI-COMPONENT GLASS SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for cleaning a multi-component glass substrate, with high cleanliness so that a latent flaw is not caused and foreign matter does not remain on the surface of the glass substrate used as the glass substrate for a magnetic disk or the glass substrate for a crystal liquid . SOLUTION: This method for manufacturing the multi-component glass substrate has a cleaning process to polish the multi-component glass substrate by an abrasive consisting mainly of cerium oxide and treat the polished multi-component glass substrate with a fluorine compound-based solution having a pH of 3-7. COPYRIGHT: (C)2005,JPO&NCIPI