| 摘要 |
Exemplary embodiments of the invention provide, on a transparent substrate, at least a part of at least one of wiring lines, electronic elements, and pixel electrodes formed by film-forming. Before and after the film-forming, an interlayer insulating film is formed. After the film-forming or the interlayer insulation, a heat treatment is performed on the transparent substrate in a single substrate process by a heater. Thus, it is possible to manufacture an electro-optical device with good productivity and high efficiency.
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