发明名称 Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
摘要 A method for converting a slope based detection task to a threshold based detection task is provided. The method initiates with defining an approximation equation for a set of points corresponding to values of a process being monitored. Then, an expected value at a current point of the process being monitored is predicted. Next, a difference between a measured value at the current point of the process being monitored and the corresponding expected value is calculated. Then, the difference is monitored for successive points to detect a deviation value between the measured value and the expected value. Next, a transition point for the process being monitored is identified based on the detection of the deviation value. A processing system configured to provide real time data for a slope based transition and a computer readable media are also provided.
申请公布号 US2005125202(A1) 申请公布日期 2005.06.09
申请号 US20050030374 申请日期 2005.01.05
申请人 LAM RESEARCH CORPORATION 发明人 GOTKIS YEHIEL;KATZ VLADIMIR;HEMKER DAVID;KISTLER RODNEY;BRIGHT NICOLAS J.
分类号 G05B23/02;H01L21/66;(IPC1-7):H03F1/26;G06F15/00;H04B15/00 主分类号 G05B23/02
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