| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device capable of an easy adjustment work, concerning the measuring device for measuring a physical property by allowing excitation light to interfere, forming a diffraction grating thereby, and diffracting probe light. SOLUTION: This device is equipped with an optical microscope body 21, an excitation light incidence optical system wherein each excitation light E1, E2 passes different peripheral parts of an objective lens 32, and the two excitation lights E1, E2 are refracted after passing the objective lens, and the two refracted excitation lights E1, E2 cross each other at a measuring point, and an interference fringe is generated, to thereby induce the diffraction grating, a probe light incidence optical system wherein the probe light P passes the center part of the objective lens 32, and the the probe light P passes the measuring point after passing the objective lens, and a detector for detecting diffracted light acquired by diffracting the probe light P passing the measuring point by the diffraction grating. Hereby, the physical property of a sample can be measured by the diffracted light. COPYRIGHT: (C)2005,JPO&NCIPI |
