| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical treatment method for a glass substrate with which irradiation light emitted from a flash lamp uniformly radiates all over a surface of the glass substrate. SOLUTION: The optical treatment method for the glass substrate includes the steps of: forming amorphous semiconductor membranes 2U, 2S, 2L which are formed on the front surface of a glass substrate 1; and performing optical treatment (crystallization or activation) by irradiating with light the amorphous semiconductor membranes 2U, 2S, 2L formed on the front surface, so that in the case of optical treatment, light does not invade the glass substrate from its side surface or its rear surface. Furthermore, a light absorptive film 4 is formed on an upper surface of a stage 3 whereon the glass substrate 1 is directly or indirectly placed. Moreover, the glass substrate 1 that is optically treated so as not to allow light to invade the glass substrate from its side surface or its rear surface, is used to manufacture a device. COPYRIGHT: (C)2005,JPO&NCIPI
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