| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater element equipped with a high-reliability heat generation part having high insulation resistance, high static resistance and high heat generation resistance. SOLUTION: An insulation film 3 formed of a silicon nitride film containing more silicon than silicon nitride having a normal composition is formed on a silicon substrate 2; a heating element 4 having a grid-like elongated part 4a is formed on the insulation film; a protective film 5 similarly formed of a silicon nitride film containing more silicon than silicon nitride having a normal composition is formed; and thus this heater element is composed. COPYRIGHT: (C)2005,JPO&NCIPI
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