发明名称 |
Quantum electronics nanocomponent has charge zone provided by nanocluster below window opening in insulation provided as etched ion track |
摘要 |
<p>Nanocomponent has a concentric clustered charge zone (CA) provided in an insulation layer (IL) between a window opening (W) and at least two electrodes above and below the charge zone, a tunnel barrier (TB) provided between the charge zone and each of the electrodes. The window opening is provided as an etched ion track (P), the charge zone provided by at least one metallic or semiconductor nanocluster (NC) and the tunnel barriers provided by regions of the insulation layer above and below the nanocluster(s). An independent claim for a manufacture of a quantum electronics nanocomponent is also included.</p> |
申请公布号 |
DE10361934(B3) |
申请公布日期 |
2005.06.09 |
申请号 |
DE2003161934 |
申请日期 |
2003.12.28 |
申请人 |
HAHN-MEITNER-INSTITUT BERLIN GMBH |
发明人 |
FINK, DIETMAR;BEHAR, MONI;LIVIO, AMARAL |
分类号 |
H01L21/265;H01L29/76;H01L29/88;(IPC1-7):H01L29/88;H01L29/772;B82B1/00;H01L21/334;B82B3/00 |
主分类号 |
H01L21/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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