,申请号JP20030008305-传众专利搜索

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发明名称
摘要
申请公布号	JP3657942(B2)	申请公布日期	2005.06.08
申请号	JP20030008305	申请日期	2003.01.16
申请人		发明人
分类号	H01L21/3065;B08B7/00;C23C16/44;H01J37/32;H01L21/304;H01L21/31;(IPC1-7):H01L21/31;H01L21/306	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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