发明名称 Substrate support
摘要 <p>Substrate carrier (1), especially for acceptance of a two-sided substrate (3) for treatment or coating with:an inner space (2) for acceptance of at least one substrate (13), a ring-shaped wall (3) at a right angle to the central plane (M) of the substrate carrier, a convex projection (4) along the outer periphery (3a) of the wall and having its apex in plane M, and two concave slots (5a,5b) for engagement with at least one holding and/or grasping device. Independent claims are also included for the following: (a) a device for handling the substrate carrier; and (b) a method for handling the substrate carrier.</p>
申请公布号 EP1538236(A2) 申请公布日期 2005.06.08
申请号 EP20040027863 申请日期 2004.11.24
申请人 SINGULUS TECHNOLOGIES AG 发明人 KEMPF, STEFAN;MERZ, THOMAS;RUNKEL, STEFFEN, DR.
分类号 B65G49/07;C23C14/50;C23C14/56;C23C16/458;H01L21/683;H01L21/687;(IPC1-7):C23C16/458 主分类号 B65G49/07
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