PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD,申请号EP20030765292-传众专利搜索

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发明名称	PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
摘要
申请公布号	EP1537596(A1)	申请公布日期	2005.06.08
申请号	EP20030765292	申请日期	2003.07.14
申请人		发明人
分类号	H05H1/46;H01J37/20;H01J37/32;H01L21/00;H01L21/3065;H01L21/683;(IPC1-7):H01J37/32	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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