发明名称 |
Elastic boundary wave device and method of manufacturing the same |
摘要 |
An elastic boundary wave device includes a first piezoelectric substrate (2), IDTs (3) arranged thereon, a first dielectric film (5) having a smoothed surface that covers the IDTs, a second substrate (6) that is a silicon-based substrate, and a second dielectric film (7) provided on a main surface of the second substrate. The smoothed surface of the first dielectric surface and a surface of the second dielectric film (7) are joined together. |
申请公布号 |
EP1538748(A2) |
申请公布日期 |
2005.06.08 |
申请号 |
EP20040256898 |
申请日期 |
2004.11.08 |
申请人 |
FUJITSU MEDIA DEVICES LIMITED;FUJITSU LIMITED |
发明人 |
MISHIMA, NAOYUKI;MIURA, MICHIO |
分类号 |
H01L41/09;H01L41/18;H01L41/22;H03H3/08;H03H9/02;H03H9/145;H03H9/25 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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