A THIN-FILM MANUFACTURE APPARATUS OF SEMICONDUCTOR SUBSTRATE,申请号KR20030086678-传众专利搜索

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发明名称	A THIN-FILM MANUFACTURE APPARATUS OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	KR20050053076(A)	申请公布日期	2005.06.08
申请号	KR20030086678	申请日期	2003.12.02
申请人	INTEGRATED PROCESS SYSTEMS LTD.	发明人	JANG, HO SEUNG;SEO, TAE WOOK
分类号	H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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