| 摘要 |
PROBLEM TO BE SOLVED: To uniform the temperature in a chamber by detecing the temperature distribution in the chamber. SOLUTION: The inside of a chamber 40 is image-sensed by using two-dimensional image sensing equipments 61, 62 such as infrared cameras. By processing the obtained image, a thermograph (temperature distribution figure) in the chamber is obtained. On the basis of the thermograph, the temperature and the flow rate of partial air-conditioning or the like of each part in the chamber are controlled to be optimum. As to temperature control, the temperature of atmosphere circulating in the chamber is wholly controlled by an air-conditioning equipment 51. Temperatures of parts, such as the temperatures of a reticle 14, projection optical system 16 and a wafer 17, and the optical path air- conditioning temperature of a laser interferometer 21 are controlled by using partial air-conditioning equipments 52, 56 and temperature adjusting parts 53, 54, 55, 57 which circulate liquid. |
