发明名称 PIEZOELECTRIC ACTUATOR
摘要 The invention relates to a piezoelectric actuator ( 1 ) comprising a stack of a plurality of individual piezoelectric actuator elements ( 2, 2', 2 '') which are arranged between inner electrodes ( 3, 3', 3 ''). Said piezoelectric actuator comprises a first metallisation strip ( 4 ) and a second metallisation strip ( 5 ), the inner electrodes ( 3, 3', 3 '') being respectively connected to the first or second metallisation strips ( 4, 5 ) in an alternating manner. A first outer electrode ( 6 ) and a second outer electrode ( 7 ) are fixed to the first or the second metallisation strips ( 4, 5 ) in order to electrically contact the piezoelectric actuator ( 1 ). Said outer electrodes ( 6, 7 ) respectively comprise a connection element ( 8, 9 ) for externally contacting the piezoelectric actuator ( 1 ), and at least one region which is embodied in such a way that it compensates length variations of the piezoelectric actuator ( 1 ) in the main oscillation direction ( 10 ) as a result of its design and arrangement. The elastic deformation exclusively extends inside a plane which is parallel to the main oscillation direction ( 10 ).
申请公布号 EP1537610(A2) 申请公布日期 2005.06.08
申请号 EP20030797169 申请日期 2003.08.13
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 SCHUERZ, WILLIBALD;SIMMET, MARTIN
分类号 H01L41/047;H01L41/083;H02N2/00;(IPC1-7):H01L41/083 主分类号 H01L41/047
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