Method of manufacturing RFID

摘要

Disclosed is a method of manufacturing an RFID in which a semiconductor chip with a memory is bonded to an antenna, and the information recorded in the memory is transmitted through the antenna. Here in the RFID, a PET film, a PEN film, or a sheet of paper is used as the base material of the antenna. The method includes: aligning the semiconductor chip with gold bumps to the antenna in which a metal foil formed of an aluminum or an aluminum alloy is adhered to the base material including a polyethylene terephthalate or a polyethylene naphthalate, and pressing the semiconductor chip to the antenna, and applying ultrasonic waves under an ambient temperature lower than the glass transition temperature of the polyethylene terephthalate or the polyethylene naphthalate to thereby bond the gold bumps and the metal foil. Thus, the method suppresses the deformation of the antenna.