发明名称 |
HOT PLATE ASSEMBLY HAVING REFLECTIVE HOT PLATE |
摘要 |
A hot plate assembly includes a base plate, a lid and a housing positioned between the base plate and the lid. The housing, lid and base plate form a process chamber. An insulator is positioned adjacent to the base plate in the process chamber. An air gap is formed at least partially between a bottom surface of the insulator and a top surface of the base plate. A hot plate is positioned adjacent to the insulator in the process chamber. At least a first reflective member is positioned between the hot plate and the insulator.
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申请公布号 |
KR20050053735(A) |
申请公布日期 |
2005.06.08 |
申请号 |
KR20057005866 |
申请日期 |
2005.04.04 |
申请人 |
SILICON VALLEY GROUP, INC. |
发明人 |
LEE JAE YUN;CHASE LOVELL C. |
分类号 |
H01L21/027;H01L21/00;(IPC1-7):H01L21/324 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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