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发明名称
EUV source
摘要
申请公布号
EP1528846(A3)
申请公布日期
2005.06.08
申请号
EP20040292256
申请日期
2004.09.20
申请人
ALCATEL
发明人
BARTHOD, BENOIT;RIVAL, JEAN-LUC;MORPAIN, MATTHIEU
分类号
G21K5/00;G03F7/20;G21K5/02;G21K5/08;H01L21/027;H05G1/00;H05G2/00;(IPC1-7):H05G2/00
主分类号
G21K5/00
代理机构
代理人
主权项
地址
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