| 摘要 |
PROBLEM TO BE SOLVED: To suppress the separation of a joint face in the case of laminatingly affixing boards provided with gas vent grooves and cutting individual chips out of the board by making the width of second grooves adjacent to the intersecting parts between first grooves and the second grooves, narrower than the other area over the specified length. SOLUTION: Gas vent grooves 120 arranged in a cut area of a board 110 are composed of wide grooves 120a about 180-280μm wide and narrow grooves 120b narrower in width than the wide grooves 120a. The narrow grooves 120b are arranged at the ends of sides forming an area to be one pressure sensor chip. The narrow groove 120 parts of the grooves 120 extending in a vertical direction thereby intersect in the intersecting parts of the cut area of the board 110. An area in a direction indicated by a dashed line is a chip groove area 100a to be a pressure sensor chip, and an area outside of this area is the cut area. A width slightly narrower than the cut area is approximately the width of a blade for cut off grinding. |
