APPARATUS AND METHOD FOR USE OF OPTICAL SYSTEM WITH PLASMA PROCESSING SYSTEM

摘要

A plasma processing system (10) and method for operating an optical system (12) in conjunction with a plasma processing system are provided. The plasma processing system includes an optical system in communication with a plasma processing chamber (14) of the plasma processing system. The optical system has a window (13) and is constructed and arranged to detect a plasma process condition through the window and a transmission condition of the window. The method includes detecting an optical emission (A) from the plasma processing region and monitoring contamination of a window provided by the optical system.