发明名称 Thin film analyzer
摘要 A thin film analyzer capable of static and dynamic measurements is disclosed. The apparatus collects and analyzes spectral reflectance data as a function of time. It is especially useful for measuring the changing thickness of a transparent, organic thin film as it is dissolved by a solvent. The measurements can be made with small quantities of solvent, on the order of one milliliter, in small, localized areas on a coated substrate, thereby allowing multiple, independent measurements on each substrate with minimal consumption of solvent.
申请公布号 US6903340(B1) 申请公布日期 2005.06.07
申请号 US20020278967 申请日期 2002.10.22
申请人 SCAIANO JUAN CESAR;BOHLAND JR. JOHN FRANCIS 发明人 SCAIANO JUAN CESAR;BOHLAND JR. JOHN FRANCIS
分类号 G01N13/00;G01N21/84;(IPC1-7):G01N1/00;H01L21/68 主分类号 G01N13/00
代理机构 代理人
主权项
地址