发明名称 |
Micro-mirror device with increased mirror tilt |
摘要 |
A micro-mirror device includes a substrate, at least one electrode formed on the substrate, and a reflective element spaced from the substrate and extending beyond the at least one electrode. The reflective element is adapted to move between a first position and at least one second position, and, when the reflective element is in the at least one second position, a minimum distance between the reflective element and the at least one electrode is greater than a minimum distance between the reflective element and the substrate.
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申请公布号 |
US6903487(B2) |
申请公布日期 |
2005.06.07 |
申请号 |
US20030367156 |
申请日期 |
2003.02.14 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
SHREEVE ROBERT W.;NIKKEL ERIC LEE;REGAN MICHAEL JOHN;ANGELOS, JR. SAM G. |
分类号 |
G02B26/08;H02N1/00;(IPC1-7):H02N1/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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