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发明名称
Method for Forming STI Type Device Isolation Film of Semiconductor Device
摘要
申请公布号
KR100492777(B1)
申请公布日期
2005.06.07
申请号
KR20020087193
申请日期
2002.12.30
申请人
发明人
分类号
H01L21/762;(IPC1-7):H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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