发明名称 Semiconductor device capable of preventing a pattern collapse
摘要 A semiconductor device is disclosed that is capable of preventing a pattern collapse phenomenon in a cell edge area in which a pattern is more fragile. The semiconductor device has a lower pattern density in an edge area than in a central area of a wafer and includes a plurality of bar-type patterns allocated at a predetermined distance in the central area of the wafer; a plurality of dummy patterns formed in the edge area; and a plurality of a connection pattern for coupling at least two of the bar-type patterns to each other, wherein the connection patterns of the plurality of dummy patterns offset or staggered with respect to each other to form a disconnected zigzag pattern.
申请公布号 US6903428(B2) 申请公布日期 2005.06.07
申请号 US20030630041 申请日期 2003.07.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE SUNG-KWON
分类号 H01L21/00;H01L21/027;H01L21/30;H01L23/58;(IPC1-7):H01L21/027 主分类号 H01L21/00
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