COATING APPARATUS HAVING STRUCTURE FOR ADJUSTING TO BE HORIZONTAL AND METHOD FOR ADJUSTING TO BE HORIZONTAL

摘要

PROBLEM TO BE SOLVED: To provide a coater that is capable of accurately adjusting the parallelism of a slit nozzle in a short time.

SOLUTION: The coater which is equipped with a parallelism adjusting mechanism measures a gap at one end side adjacent to a horizontal axis 12 by a gap sensor 21 and measures a gap at one end side adjacent to an adjustment screw 13 by a gap sensor 22, by arranging a tray 20 only used for the measurement on a table 3 at the lower part of the slit nozzle 11. The slit nozzle 11 is considered to be parallel when the readings of the gap sensor 21, 22 are equivalent. If the readings are not equivalent, the adjustment screw 13 is turned so that they become equal. In this case, since the gap of the one end side adjacent to the horizontal axis 12 is fixed, the adjustment is conducted so that the reading at the one end side adjacent to the adjustment screw 13 approaches that of the gap sensor 21.

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