发明名称 Tube carrier reaction apparatus
摘要 The disclosure relates to an apparatus for manufacturing a product, including a product stage assembly, having a movable product stage, the product stage assembly having at least one input is supplied by at least one tube. A tube carrier assembly for positioning the at least one tube relative to the product stage assembly is also provided along with a reaction apparatus positioned to absorb inertial forces created by tube carrier assembly movement substantially independently of inertial forces created by movable product stage movement. A method of operation therefore is also provided.
申请公布号 US6903467(B2) 申请公布日期 2005.06.07
申请号 US20030339701 申请日期 2003.01.08
申请人 NIKON CORPORATION 发明人 HAZELTON ANDREW J.
分类号 G03F7/20;(IPC1-7):H01L21/027;G03B27/62;G03B24/42 主分类号 G03F7/20
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