| 摘要 |
A stage assembly ( 10 ) for moving and positioning a device ( 26 ) includes a device stage ( 14 ), a stage mover assembly ( 16 ), and a follower assembly ( 18 ). The stage mover assembly ( 16 ) moves the device stage ( 14 ) along an X axis, along a Y axis and about a Z axis. The follower assembly ( 18 ) includes a first follower guide ( 76 ) and a first follower frame ( 80 ). The first follower guide ( 76 ) supports the first follower frame ( 80 ) and allows the first follower frame ( 80 ) to move along the Y axis. Further, the first follower frame ( 80 ) supports the device stage ( 14 ) and allows the device stage ( 14 ) to move along the Y axis, along the X axis, and about the Z axis. Importantly, the first follower frame ( 80 ) is moved along the Y axis with a first follower mover ( 84 ). With this design, the device stage ( 14 ) can be made relatively thin vertically and the control lines ( 20 ) to the device stage ( 14 ) can be relatively short.
|
