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发明名称
PROCEDE POUR LE DEPOT PAR CVD D'UN FILM D'ARGENT SUR UN SUBSTRAT
摘要
申请公布号
FR2852971(B1)
申请公布日期
2005.06.03
申请号
FR20030003613
申请日期
2003.03.25
申请人
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS;QUALIFLOW SA
发明人
DECAMS JEAN EMMANUEL;GUILLON HERVE;DOPPELT PASCAL
分类号
C23C16/18;(IPC1-7):C23C16/448;C23C16/16
主分类号
C23C16/18
代理机构
代理人
主权项
地址
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