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发明名称
PROCESSING SYSTEM
摘要
申请公布号
KR100495163(B1)
申请公布日期
2005.06.03
申请号
KR19990047408
申请日期
1999.10.29
申请人
TOKYO ELECTRON LIMITED
发明人
OTA YOSHIHARU
分类号
G02F1/13;H01L21/00;(IPC1-7):G02F1/13
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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